✦ LIBER ✦
Effect of additional VHF plasma source base on conventional RF-PECVD for large area fast growth microcrystalline silicon films
✍ Scribed by Youn J. Kim; Yoon S. Choi; In S. Choi; Jeon G. Han
- Book ID
- 113514116
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 481 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1567-1739
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