Impact of the Cu-based substrates and ca
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M. Dubosc; S. Casimirius; M.-P. Besland; C. Cardinaud; A. Granier; J.-L. Duvail;
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Article
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2007
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Elsevier Science
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English
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This article reports on carbon nanotubes (CNT) grown on TiN/Cu stacks by plasma enhanced chemical vapor deposition (PECVD) at 450 ยฐC. Ni catalyst was deposited by two techniques -physical vapor deposition (PVD) and electrochemical deposition (ECD). First, the influence of the catalyst thickness and