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Substrate-assisted laser patterning of indium tin oxide thin films

✍ Scribed by O. Yavas; C. Ochiai; M. Takai


Book ID
111707040
Publisher
Springer
Year
1999
Tongue
English
Weight
161 KB
Volume
69
Category
Article
ISSN
1432-0630

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We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal laye