✦ LIBER ✦

High-resolution, resistless patterning of indium-tin-oxide thin films using excimer laser projection annealing process

✍ Scribed by Junghun Chae; Linus Jang; Kanti Jain

Book ID: 113793443
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 450 KB
Volume: 64
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2010.01.068

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Laser-driven high-resolution patterning

Laser-driven high-resolution patterning of indium tin oxide thin film for electronic device

✍ Hyunkwon Shin; Boyeon Sim; Myeongkyu Lee 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 975 KB

We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal laye

A study of stitch line formation during

A study of stitch line formation during high speed laser patterning of thin film indium tin oxide transparent electrodes

✍ Paul M. Harrison; Nick Hay; Duncan P. Hand 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 978 KB

High speed laser patterning of indium tin oxide thin films on glass is part of the production method used to produce transparent conductive electrodes for plasma display panels. Such a design consists of rows of repeating electrode structures which cover the active area of the display. Whilst the pa