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Substrate and pretreatment dependence of Cu nucleation by metal–organic chemical vapor deposition

✍ Scribed by Sung Kwan Kwak; Kwan Soo Chung; Ikmo Park; H Lim


Book ID
104443710
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
489 KB
Volume
2
Category
Article
ISSN
1567-1739

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