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Some effects of temperature ramping on metal organic chemical vapor deposited Al film nucleation

✍ Scribed by D Yang; R Jonnalagadda; V Mahadev; T.S Cale; J.T Hillman; R.F Foster; B.R Rogers


Book ID
114086207
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
563 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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