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Sublimation epitaxy of 3C-SiC grown at Si- and C-rich conditions

✍ Scribed by M. Beshkova; J. Birch; M. Syväjärvi; R. Yakimova

Book ID: 113940988
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 556 KB
Volume: 86
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2012.03.020

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