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Study on three-dimensional distribution of implanted ions by He+ backscattering technique : Ishiwara, Furukawa, Matsumura and Natsuaki. Proceedings 4th Conference on Solid State Devices, Tokyo. 30–31 August (1972). Japan Soc. Appl. Phys. 42 (1973) Suppl., p. 124

Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 100 KB
Volume: 12
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(73)90105-4

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