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Low-energy implantation of boron in silicon : Yoshihiro and Tokuyama. Proceedings 4th Conference on Solid State Devices, Tokyo, 30–31 August (1972). Japan Soc. Appl. Phys. 42 (1973) Suppl., p. 113


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
71 KB
Volume
12
Category
Article
ISSN
0026-2714

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