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Study on the hydrogen depth profiles in amorphous silicon films by elastic recoil detection

โœ Scribed by Liao Changgeng; Wang Yongqiang; Yang Shengsheng; Jiang Hui; Zheng Zhihao


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
408 KB
Volume
44
Category
Article
ISSN
0042-207X

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