Study on the accumulated impurities at the epilayer/substrate interface and their influence on the leakage current of metal-semiconductor-field effect transistors

✍ Scribed by Shigekazu Izumi; Naoto Yoshida; Hirozo Takano; Kazuo Nishitani; Mutsuyuki Otsubo

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 729 KB
• Volume: 133
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(93)90112-a