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Study on PECVD SiO2/Si3N4double-layer electrets with different thicknesses

✍ Scribed by XuDong Zou; JinWen Zhang

Book ID: 107357018
Publisher: SP Science China Press
Year: 2011
Tongue: English
Weight: 697 KB
Volume: 54
Category: Article
ISSN: 1006-9321
DOI: 10.1007/s11431-011-4423-z

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