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Study of Thin Oxide Films by Electron, Ion and Synchrotron Radiation Beams

✍ Scribed by Sammelselg, Väino ;Rauhala, Eero ;Arstila, Kai ;Zakharov, Alex ;Aarik, Jaan ;Kikas, Arvo ;Karlis, Juhan ;Tarre, Aivar ;Seppälä, Anni ;Asari, Jelena ;Martinson, Indrek

Book ID
106198100
Publisher
Springer-Verlag
Year
2002
Weight
78 KB
Volume
139
Category
Article
ISSN
0344-838X

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The crystal structure of In 2 S 3 thin films obtained by the chemical vapor deposition method from the volatile complex compounds indium(III) isopropyl xanthate and indium(III) diethyl dithiocarbonate was studied by synchrotron radiation diffraction. High photon beam intensity (3 ؋ 10 10 photons/mm