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Combined ion, electron, and X-ray beams for studies of surfaces and thin films

✍ Scribed by R.G. Musket


Publisher
Elsevier Science
Year
1977
Weight
451 KB
Volume
144
Category
Article
ISSN
0029-554X

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We applied grazing incidence x-ray specular and non-specular reΓ‘ectivity (GIXR) and small-angle x-ray scattering (SAXS) to study the surface roughness of gold Ðlms on quartz glass substrates. Two model systems were prepared : one series of Au Ðlms was sputtered in Ar at 3 Γ‚ 10-3mbar (Au1 Ðlms) and o