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Study of thin films of NaxC60: electrochemical intercalation and physical properties

✍ Scribed by G.B.M. Vaughan; M. Barral; T. Pagnier; Y. Chabre


Book ID
116136910
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
519 KB
Volume
77
Category
Article
ISSN
0379-6779

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Physical properties of TiN thin films
✍ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties