Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers

✍ Scribed by Gavrylyuk, O.O.; Semchyk, O.Yu.; Bratus, O.L.; Evtukh, A.A.; Steblova, O.V.; Fedorenko, L.L.

• Book ID: 121311709
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 334 KB
• Volume: 302
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2013.09.171