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Study of the mechanical properties of ceramic materials by the nanoindentation technique

✍ Scribed by J. Woirgard; C. Tromas; J.C. Girard; V. Audurier

Book ID
108473716
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
229 KB
Volume
18
Category
Article
ISSN
0955-2219

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A plasma-polymerized tetravinylsilane film of about 1 ΞΌm thickness was prepared under steady-state deposition conditions on polished silicon wafer using plasma-enhanced chemical vapor deposition. Nearsurface mechanical properties such as the reduced modulus and hardness of the plasma polymer film we