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Study of the effect of plasma power on ZnO thin films growth using electron cyclotron resonance plasma-assisted molecular-beam epitaxy

✍ Scribed by Z. Yang; J.-H. Lim; S. Chu; Z. Zuo; J.L. Liu

Book ID
108063776
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
760 KB
Volume
255
Category
Article
ISSN
0169-4332

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## Abstract Nanostructured ZnO films were fabricated on nanopored Si(001) surfaces through reactive ion etching and plasma‐assisted molecular‐beam epitaxy techniques. Nanowall‐like nanostructures were formed on the ZnO film surfaces depending on the thickness of the ZnO films. Significant enhanceme