Study of the defect elimination mechanisms in aspect ratio trapping Ge growth

✍ Scribed by Bai, J.; Park, J.-S.; Cheng, Z.; Curtin, M.; Adekore, B.; Carroll, M.; Lochtefeld, A.; Dudley, M.

• Book ID: 121818448
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 499 KB
• Volume: 90
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2711276