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Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM–EELS and XPS

✍ Scribed by S Schamm; R Berjoan; P Barathieu

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 322 KB
Volume: 107
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2003.10.010

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