✦ LIBER ✦

Study of SF 6 and SF 6 /O 2 plasmas in a hollow cathode reactive ion etching reactor using Langmuir probe and optical emission spectroscopy techniques

✍ Scribed by Pessoa, R S; Tezani, L L; Maciel, H S; Petraconi, G; Massi, M

No coin nor oath required. For personal study only.

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