Investigation of atomic oxygen density in a capacitively coupled O 2 /SF 6 discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe

✍ Scribed by Kechkar, S; Swift, P; Conway, J; Turner, M; Daniels, S

• Book ID: 120715716
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 392 KB
• Volume: 22
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/22/4/045013