Study of Schottky barrier height modulation for NiSi/Si contact with an antimony interlayer

✍ Scribed by Guo, Xiao; Tang, Yang; Jiang, Yu-Long; Qu, Xin-Ping; Ru, Guo-Ping; Zhang, David Wei; Deduytsche, Davy; Detavernier, Christophe

• Book ID: 122482590
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 914 KB
• Volume: 106
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.01.006