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Study of ion-beam-induced epitaxy in Si by slow positron annihilation and RBS channeling

โœ Scribed by N. Hayashi; R. Suzuki; H. Watanabe; I. Sakamoto; N. Kobayashi; T. Mikado; T. Yamazaki; K. Kuriyama


Book ID
113283535
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
306 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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