𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Study of indium tin oxide thin film for separative extended gate ISFET

✍ Scribed by Li-Te Yin; Jung-Chuan Chou; Wen-Yaw Chung; Tai-Ping Sun; Shen-Kan Hsiung


Book ID
114192526
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
170 KB
Volume
70
Category
Article
ISSN
0254-0584

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Characterization of Indium-Tin-Oxide Thi
✍ A. Jakubec; V. Tvarozek; I. Novotny; V. Rehacek; V. Breternitz; Ch. Knedlik; L. πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 557 KB

## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr