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Study of hydrogen stability in low-k dielectric films by ion beam techniques

✍ Scribed by Y. Zhang; L. Saraf; V. Shutthanandan; K.D. Hughes; R. Kuan; S. Thevuthasan

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 232 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.04.022

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