Study of elemental and phase composition of PZT thin films by auger depth profiling
β Scribed by V. G. Beshenkov; V. A. Marchenko; A. G. Znamenskii
- Book ID
- 110203302
- Publisher
- Pleiades Publishing
- Year
- 2010
- Tongue
- English
- Weight
- 194 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1027-4510
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In-depth composition profiles of the an&c oxide films grown on Al (1 I1 ), (I 10) and (100) single crystal electrodes in ammonium borate were studied by Auger electron spectroscopy with Ar ion etching. The oxide film had the composition of Ai,O, as referenced to an authentic a-Al,O, single crystal.