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Study of Deposition Temperature Effect on Defect Density in ZrN Thin Films by Positron Annihilation

✍ Scribed by Saleh, Abdulnasser S.

Book ID: 125831859
Publisher: Elsevier
Year: 2014
Tongue: English
Weight: 487 KB
Volume: 75
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2013.11.007

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