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Study of defects in silicon after low energy H+ implantation by DLTS measurements

✍ Scribed by Krynicki, J. ;Muller, J. C. ;Siefert, P. ;Brylowska, I. ;Paprocki, K.

Publisher: John Wiley and Sons
Year: 1987
Tongue: English
Weight: 289 KB
Volume: 100
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211000128

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