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Studies on the preferred orientation changes and its influenced properties on ITO thin films

โœ Scribed by P Thilakan; J Kumar


Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
489 KB
Volume
48
Category
Article
ISSN
0042-207X

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Aluminium-nitride films were prepared on glass substrates by reactive radio frequency (r.f.) magnetron sputtering in argon/nitrogen gas mixtures containing 25 --~ 75% nitrogen at substrate temperatures below 150 ยฐC. It is important to control the crystallographic orientation and the surface morpholo