Studies of buried interfaces by optical second-harmonic generation
โ Scribed by T. Rasing
- Publisher
- Springer
- Year
- 1994
- Tongue
- English
- Weight
- 593 KB
- Volume
- 59
- Category
- Article
- ISSN
- 1432-0630
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๐ SIMILAR VOLUMES
We report experiments using a non-invasive second harmonic generation (SHG) technique to characterize buried Si/SiO 2 interfaces and also SIMOX thin film silicon-on-insulator (SOI) wafers. The measurements demonstrate that the SHG response can provide an indication of the quality of the buried oxide
Metal-electrolyte interfaces are associated with a strong (-10 Vm-i) electrostatic field. When such an interface. is studied with second harmonic generation, this field can complicate the optical data by introducing a third-order electronic response of the metal. A theoretical framework is presented