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Structures of nitridated layers on sapphire studied by x-ray reflectivity and diffraction

✍ Scribed by Kim, Ki-Sung; Kim, Seon-Hyo; Lee, Dong-Ryul


Book ID
120973360
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
366 KB
Volume
76
Category
Article
ISSN
0003-6951

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## Abstract Structural state of nonpolar a‐plane GaN layers grown by MOVPE on r‐plane sapphire is investigated by X‐ray diffraction method. Interplanar spacings were measured in three directions and corresponding strains were determined. A crystalline perfection was studied by measurement of diffra