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Structure, optical and electrical properties of silicon-rich silicon nitride films

✍ Scribed by V.V. Voskoboynikov; V.A. Gritsenko; N.D. Dikovskaya; B.N. Zaitsev; K.P. Mogilnicov; V.M. Osadchii; S.P. Sinitsa; F.L. Edelman

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