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Electrical conduction and breakdown properties of silicon nitride films

✍ Scribed by D. Mangalaraj; M. Radhakrishnan; C. Balasubramanian

Publisher: Springer
Year: 1982
Tongue: English
Weight: 337 KB
Volume: 17
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00752262

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