✦ LIBER ✦

Electrical properties of plasma-deposited fluorinated silicon nitride

✍ Scribed by R.E. Livengood; D.W. Hess

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Regularities of growth and electrical pr

✍ L.N. Aleksandrov; I.I. Belousov; V.M. Efimov 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 312 KB

Properties of metal-semiconductor contac

✍ J. Kolník; J. Ivančo 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 631 KB

Remote Plasma-Enhanced CVD of Fluorinate

✍ Prof. Sergei E. Alexandrov; Michael L. Hitchman 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 722 KB

Physical and electrical characterisation

✍ G.P. Kennedy; S. Taylor; W. Eccleston; W.M. Arnoldbik; F.H.P.M. Habraken 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 306 KB

Densification of plasma deposited silico

✍ Richard E. Rocheleau; Zhe Zhang 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 743 KB

Hydrogen-related mechanical stress in am

✍ P. Paduschek; Ch. Höpfl; H. Mitlehner 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 723 KB