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The structure of silicon nitride films I. Stoichiometric silicon nitride

โœ Scribed by Edelman, F. L. ;Latuta, V. Z. ;Zaitsev, B. N. ;Khoromenko, A. A.


Publisher
John Wiley and Sons
Year
1978
Tongue
English
Weight
467 KB
Volume
50
Category
Article
ISSN
0031-8965

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