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Structure of thin-film nickel-carbon composites formed by microwave plasma-enhanced chemical vapor deposition

✍ Scribed by V. V. Uglov; M. V. Astashynskaya; A. K. Kuleshov; M. P. Samtsov; P. B. Barna

Book ID
110203463
Publisher
Pleiades Publishing
Year
2011
Tongue
English
Weight
944 KB
Volume
5
Category
Article
ISSN
1027-4510

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The interface structure in copolymer films made using plasma enhanced chemical vapor deposition (PECVD) has been probed for the first time using X-ray reflectivity. Copolymer films made from comonomers benzene (B), octafluorocyclobutane (OFCB), and hexamethyldisiloxane (HMDS) show extremely sharp in