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Structure of thermally induced microdefects in Czochralski silicon after high‐temperature annealing

✍ Scribed by Ponce, F. A.; Yamashita, T.; Hahn, S.


Book ID
115531794
Publisher
American Institute of Physics
Year
1983
Tongue
English
Weight
513 KB
Volume
43
Category
Article
ISSN
0003-6951

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