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Structure of the modified surface layer formed by ion bombardment of SiO2 films

✍ Scribed by I.P. Lisovskii; V.G. Litovchenko; V.B. Lozinskii; V.P. Melnik; S.I. Frolov

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
592 KB
Volume
247
Category
Article
ISSN
0040-6090

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