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Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

✍ Scribed by Mahony, C. M. O.; McFarland, J.; Steen, P. G.; Graham, W. G.


Book ID
121835026
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
231 KB
Volume
75
Category
Article
ISSN
0003-6951

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