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Structure Evolution of 3C-SiC on Cubic and Hexagonal Substrates

✍ Scribed by Yakimova, Rositza; Yazdi, G.Reza; Sritirawisarn, Nut; Syväjärvi, Mikael

Book ID
120711134
Publisher
Trans Tech Publications, Ltd.
Year
2006
Tongue
English
Weight
958 KB
Volume
527-529
Category
Article
ISSN
1662-9752

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## Abstract We present our recent results on the growth of cubic AlN (001) layers by plasma assisted molecular beam epitaxy (PAMBE) using freestanding 3C‐SiC (001) substrate. For high‐quality c‐AlN layers reflection high‐electron energy diffraction (RHEED) patterns in all azimuths show RHEED patter