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Structure, corrosion, and hardness properties of Ti/Al multilayers coated on NdFeB by magnetron sputtering

✍ Scribed by Tingting Xie; Shoudong Mao; Chao Yu; Shaojie Wang; Zhenlun Song

Book ID
113940987
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
952 KB
Volume
86
Category
Article
ISSN
0042-207X

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Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 Β°C and 500 Β°C