Structure changes by annealing and doping of a-Si:H prepared at high deposition rate studied by means of positron annihilation

✍ Scribed by Hiroyuki Nasu; Masao Watanabe; Kiyoshi Shizuma; Seigo Makida; Masato Ueda; Takeshi Imura; Yukio Osaka; Hiromi Hasai

• Book ID: 119443948
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 354 KB
• Volume: 95-96
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(87)80158-8