Structural, optical and electrical properties of hydrogenated amorphous silicon germanium (a-Si1−xGex) deposited by DC magnetron sputtering at high rate

✍ Scribed by A. Fedala; R. Cherfi; M. Aoucher; T. Mohammed-Brahim

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 154 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.08.016