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Structure and stability of sputter deposited beta-tungsten thin films

✍ Scribed by Weerasekera, I. A.; Shah, S. Ismat; Baxter, David V.; Unruh, K. M.

Book ID: 120855236
Publisher: American Institute of Physics
Year: 1994
Tongue: English
Weight: 527 KB
Volume: 64
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.111318

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