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Structure and properties of zinc oxide films deposited in the recombination burning zone of a low-temperature plasma

✍ Scribed by E. I. Burylin; A. G. Veselov; A. S. Dzhumaliev; V. I. Elmanov; S. N. Istomin; O. A. Kiryasova; T. A. Pushkareva; S. L. Ryabushkin


Book ID
111447946
Publisher
Springer
Year
2007
Tongue
English
Weight
170 KB
Volume
52
Category
Article
ISSN
1063-7842

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## Abstract Zinc oxide (ZnO) thin films were synthesized by pulsed laser deposition (PLD) and atomic layer deposition (ALD) at 100 °C on glass, and their structural, electrical, and optical properties were compared before and after 300 °C post‐deposition annealing in argon, vacuum, and air. The roo