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Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering

✍ Scribed by Zhongtian Yang; Liya Zhu; Bing Yang; Liping Guo; Dejun Fu


Book ID
107403904
Publisher
Wuhan University of Technology
Year
2009
Tongue
English
Weight
438 KB
Volume
24
Category
Article
ISSN
1000-2413

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