Synthesis of Ti–Si–N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering

✍ Scribed by Z.T. Yang; B. Yang; L.P. Guo; D.J. Fu

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 660 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.06.126