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Effect of bias voltage on the structure and hardness of TiSiN composite coatings synthesized by cathodic arc assisted middle-frequency magnetron sputtering

โœ Scribed by Z.T. Yang; B. Yang; L.P. Guo; D.J. Fu


Book ID
116603764
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
798 KB
Volume
473
Category
Article
ISSN
0925-8388

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