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Structure and mechanical properties of Al/AlN multilayer with different AlN layer thickness

✍ Scribed by Z.G. Wu; G.A. Zhang; M.X. Wang; X.Y. Fan; P.X. Yan; T. Xu

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 708 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.05.039

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